New diffraction grating profiles in InP for DFB lasers and integrated optics
作者： L.D. Westbrook , A.W. Nelson , P.J. Fiddyment
DOI: 10.1049/EL:19830730
关键词: Distributed Bragg reflector laser 、 Fabrication 、 Grating 、 Optoelectronics 、 Optics 、 Blazed grating 、 Distributed feedback laser 、 Materials science 、 Laser 、 Diffraction grating 、 Semiconductor laser theory
摘要: A bilevel processing technique has been used to obtain sub-micrometer-period InP diffraction gratings. Novel cross-sectional grating profiles with depths of up 4000 have obtained which should facilitate the fabrication more efficient Bragg devices.
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