The effect of laser wavelength on emission and particle dynamics of Sn plasma
作者： D. Campos , S. S. Harilal , A. Hassanein
DOI: 10.1063/1.3493118
关键词: Atomic physics 、 Ion 、 Emission spectrum 、 Plasma diagnostics 、 Extreme ultraviolet 、 Materials science 、 Laser 、 Spectroscopy 、 Laser-induced breakdown spectroscopy 、 Faraday cup
摘要: We investigated the effects of laser wavelength on atomic, ionic, and radiative emission from laser-produced tin plasmas. For generating plasmas, planar targets were excited using either high intensity neodymium-doped yttrium aluminum garnet (Nd:YAG, 1.06 μm) or carbon dioxide (CO2, 10.6 μm) pulses; both are considered to be potential excitation lasers for an extreme ultraviolet (EUV) lithography plasma light source. Various diagnostic tools utilized investigating neutral, Sn plasmas including Faraday cup, witness plate in conjunction with x-ray photoelectron spectroscopy (XPS), EUV, visible photography. Atomic ionic analysis showed that amount debris emitted by Nd:YAG generated was considerably higher than CO2 The angular distributions atomic found more forward-centric 1.06 μm while being much...
scitation.org
harvard.edu
aip.org
sci-hub.se 参考文章(32)
D. Campos, S. S. Harilal, A. Hassanein, Laser wavelength effects on ionic and atomic emission from tin plasmas Applied Physics Letters. ,vol. 96, pp. 151501- ,(2010) , 10.1063/1.3386524
SS Harilal, CV Bindhu, MS Tillack, F Najmabadi, AC Gaeris, None, Internal structure and expansion dynamics of laser ablation plumes into ambient gases Journal of Applied Physics. ,vol. 93, pp. 2380- 2388 ,(2003) , 10.1063/1.1544070
S S Harilal, B O'Shay, M S Tillack, Y Tao, R Paguio, A Nikroo, C A Back, Spectral control of emissions from tin doped targets for extreme ultraviolet lithography Journal of Physics D. ,vol. 39, pp. 484- 487 ,(2006) , 10.1088/0022-3727/39/3/010
Noah Hurst, S. S. Harilal, Pulse shaping of transversely excited atmospheric CO2 laser using a simple plasma shutter Review of Scientific Instruments. ,vol. 80, pp. 035101- 035101 ,(2009) , 10.1063/1.3079698
S. S. Harilal, M. S. Tillack, Y. Tao, B. O'Shay, R. Paguio, A. Nikroo, Extreme-ultraviolet spectral purity and magnetic ion debris mitigation by use of low-density tin targets. Optics Letters. ,vol. 31, pp. 1549- 1551 ,(2006) , 10.1364/OL.31.001549
R. W. Coons, S. S. Harilal, D. Campos, A. Hassanein, Analysis of atomic and ion debris features of laser-produced Sn and Li plasmas Journal of Applied Physics. ,vol. 108, pp. 063306- ,(2010) , 10.1063/1.3486209
Akihisa Nagano, Takayasu Mochizuki, Shuji Miyamoto, Sho Amano, Laser wavelength dependence of extreme ultraviolet light and particle emissions from laser-produced lithium plasmas Applied Physics Letters. ,vol. 93, pp. 091502- ,(2008) , 10.1063/1.2975180
J. P. Allain, M. Nieto, M. R. Hendricks, P. Plotkin, S. S. Harilal, A. Hassanein, IMPACT: A facility to study the interaction of low-energy intense particle beams with dynamic heterogeneous surfaces Review of Scientific Instruments. ,vol. 78, pp. 113105- 113105 ,(2007) , 10.1063/1.2805677
S.S. Harilal, J.P. Allain, A. Hassanein, M.R. Hendricks, M. Nieto-Perez, Reactivity of lithium exposed graphite surface Applied Surface Science. ,vol. 255, pp. 8539- 8543 ,(2009) , 10.1016/J.APSUSC.2009.06.009
S. Namba, S. Fujioka, H. Sakaguchi, H. Nishimura, Y. Yasuda, K. Nagai, N. Miyanaga, Y. Izawa, K. Mima, K. Sato, K. Takiyama, Characterization of out-of-band radiation and plasma parameters in laser-produced Sn plasmas for extreme ultraviolet lithography light sources Journal of Applied Physics. ,vol. 104, pp. 013305- ,(2008) , 10.1063/1.2952033