Coating liquid for formation of amorphous silica-based coating film having low dielectric constant and method for preparing the same coating liquid
作者： 映 矢野 , 義弘 中田 , Ei Yano , 美紀 江上 , Katsumi Suzuki
DOI:
关键词: Orthosilicate 、 Tetramethyl orthosilicate 、 Coating 、 Hydroxide 、 Dielectric 、 Materials science 、 Silicon 、 Chromatography 、 Chemical engineering 、 Methyltrimethoxysilane 、 Tetraethyl orthosilicate
摘要: PROBLEM TO BE SOLVED: To provide a coating liquid forming an amorphous silica-based film with low dielectric constant, having small relative constant of ≤2.5 and Young's modulus ≥6.0 GPa excellent in hydrophobic properties. SOLUTION: The comprises (a) silicon compound obtained by hydrolyzing tetraalkyl orthosilicate (TAOS) specific alkoxysilane (AS) the presence tetraalkylammonium hydroxide (TAAOH). Tetraethyl (TEOS), tetramethyl (TMOS) or mixture thereof is used as (TAOS), methyltrimethoxysilane (MTMS), methyltriethoxysilane (MTES) alkoxysilane. COPYRIGHT: (C)2004,JPO
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