Coating Liquid for Forming Low Dielectric Constant Amorphous Silica-Based Coating Film and the Coating Film Obtained From the Same
作者： Miki Egami , Akira Nakashima , Hiroki Arao , Michio Komatsu
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摘要: A coating liquid for forming a low dielectric constant amorphous silica-based film with of 3.0 or below and strength (Young's modulus) GPa more, also having smooth surface an excellent hydrophobicity. The contains (1) silicon compound obtained by hydrolyzing bis(trialcoxysilyl)alkane (BTASA) alcoxysilane (AS) in the presence tetraalkylammoniumhydroxide (TAAOH), (2) (BTASA), tetraalkylorthosilicate (TAOS) (TAAOH).
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