Silica coating liquid for forming low dielectric constant and silica coat substrate with low dielectric constant

摘要: PROBLEM TO BE SOLVED: To provide a silica coating liquid for forming low-dielectric constant with dielectric as small <=2.5, having low moisture absorbability and high mechanical strength. SOLUTION: This contains (A) at least one silicon compound selected from the group consisting of alkoxysilanes general formula (I): XnSi(OR)4-n silane halides (II): XnSiX'4-n (B) an organic template material (III): [R1R2R3R4N]+Y- (in these formulas, X is H, F, 1-8C alkyl, fluorine-substituted aryl or vinyl; R X' halogen atom; n integer 0-3; R1 1-20C hydrocarbon group; R2 to R4 are each H may be same R1; Y atom OH).