Mid-infrared materials and devices on a Si platform for optical sensing

摘要: In this article, we review our recent work on mid-infrared (mid-IR) photonic materials and devices fabricated silicon for on-chip sensing applications. Pedestal waveguides based are demonstrated as broadband mid-IR sensors. Our low-loss directional couplers in SiNx useful differential Photonic crystal cavities microdisk resonators chalcogenide glasses high sensitivity also effective Polymer-based functionalization layers, to enhance the selectivity of sensor devices, presented. We discuss design integrated with polycrystalline PbTe detectors a monolithic platform optical sensing, wherein use low-index spacer layer enables evanescent coupling light from detector. Finally, show successful fabrication processing first prototype waveguide-integrated detectors.