Fabrication and testing of planar chalcogenide waveguide integrated microfluidic sensor
作者： Juejun Hu , Vladimir Tarasov , Anu Agarwal , Lionel Kimerling , Nathan Carlie
DOI: 10.1364/OE.15.002307
关键词: Optoelectronics 、 Polydimethylsiloxane 、 Chalcogenide 、 Wafer 、 Substrate (electronics) 、 Plasma etching 、 Optics 、 Materials science 、 Fabrication 、 Chalcogenide glass 、 Silicon
摘要: … Given the advantages of microfluidic analytical chips over their conventional … to integrate microfluidic systems with planar optical waveguides for spectroscopic sensing [2, 3] and optical …
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