Monolithic integration of microfluidic channels and optical waveguides in silica on silicon.
作者： Peter Friis , Karsten Hoppe , Otto Leistiko , Klaus Bo Mogensen , Jörg Hübner
DOI: 10.1364/AO.40.006246
关键词:
摘要: … Only a minor increase (∼5%) in the numerical aperture is found when the dike width is 10 µm. Anodic bonding experiments show that 10 µm is sufficient to ensure reproducible results. …
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Howard M. Shapiro, Practical Flow Cytometry ,(1985)
Galen Wood Ewing, Instrumental methods of chemical analysis ,(1954)
Masao Kawachi, Silica waveguides on silicon and their application to integrated-optic components Optical and Quantum Electronics. ,vol. 22, pp. 391- 416 ,(1990) , 10.1007/BF02113964
A. Manz, N. Graber, H.M. Widmer, Miniaturized total chemical analysis systems: A novel concept for chemical sensing Sensors and Actuators B: Chemical. ,vol. 1, pp. 244- 248 ,(1990) , 10.1016/0925-4005(90)80209-I
G.D. Maxwell, B.J. Ainslie, Demonstration of a directly written directional coupler using UV-induced photosensitivity in a planar silica waveguide Electronics Letters. ,vol. 31, pp. 95- 96 ,(1995) , 10.1049/EL:19950071
Torben Storgaard‐Larsen, Otto Leistiko, Plasma‐Enhanced Chemical Vapor Deposited Silicon Oxynitride Films for Optical Waveguide Bridges for Use in Mechanical Sensors Journal of The Electrochemical Society. ,vol. 144, pp. 1505- 1513 ,(1997) , 10.1149/1.1837619
A. Never, T. Pohlmann, Fabrication of low-loss titanium-diffused LiNbO3 waveguides using a closed platinum crucible Electronics Letters. ,vol. 23, pp. 1187- 1188 ,(1987) , 10.1049/EL:19870825
Jörg Hübner, Klaus B. Mogensen, Anders M. Jorgensen, Peter Friis, Pieter Telleman, Jörg P. Kutter, Integrated optical measurement system for fluorescence spectroscopy in microfluidic channels Review of Scientific Instruments. ,vol. 72, pp. 229- 233 ,(2001) , 10.1063/1.1326929
R.E. Kunz, Miniature integrated optical modules for chemical and biochemical sensing Sensors and Actuators B-chemical. ,vol. 38, pp. 13- 28 ,(1997) , 10.1016/S0925-4005(97)80167-0
S. C. Jakeway, A. J. de Mello, E. L. Russell, Miniaturized total analysis systems for biological analysis. Fresenius Journal of Analytical Chemistry. ,vol. 366, pp. 525- 539 ,(2000) , 10.1007/S002160051548