Development of High-Speed Actuator for Scanning Probe Microscopy
作者： Yasuhiro Sugawara , Yan Jun Li , Yoshitaka Naitoh , Masami Kageshima
DOI: 10.1007/978-1-84882-991-6_5
关键词: Acoustics 、 Charge amplifier 、 Actuator 、 Scanning capacitance microscopy 、 Materials science 、 Bandwidth (signal processing) 、 Scanning probe microscopy 、 Scanning confocal electron microscopy 、 Scanning ion-conductance microscopy 、 Piezoelectric actuators
摘要: A novel closed-loop regulation of a piezoelectric actuator is presented to implement wide-band and hysteresis-free motion required for high speed operation scanning probe microscopy. Velocity the actuator’s detected via induced current, converted displacement by integration. By appropriately applying both velocity feedbacks, fundamental resonance was completely eliminated other subresonances were significantly suppressed. bandwidth ca. 300 kHz dynamic achieved consequently. Actuator’s intrinsic hysteresis also
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