Regulation of a microcantilever response by force feedback

作者: J. Mertz , O. Marti , J. Mlynek

DOI: 10.1063/1.109413

关键词: Dynamics (mechanics)Quality (physics)Haptic technologyAnalytical chemistryIntensity (heat transfer)AcousticsPiezoelectricityResonanceCantileverChemistrySignal-to-noise ratio

摘要: A feedback mechanism is used to control the forces incident on a mechanical microcantilever as a function of the monitored cantilever motion. The control is effected by modifying the …

参考文章(13)
U Dürig, O Züger, A Stalder, None, Interaction force detection in scanning probe microscopy: Methods and applications Journal of Applied Physics. ,vol. 72, pp. 1778- 1798 ,(1992) , 10.1063/1.352348
Gerhard Meyer, Nabil M. Amer, Erratum: Novel optical approach to atomic force microscopy [Appl. Phys. Lett. 53, 1045 (1988)] Applied Physics Letters. ,vol. 53, pp. 2400- 2402 ,(1988) , 10.1063/1.100425
O. Wolter, Micromachined silicon sensors for scanning force microscopy Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. ,vol. 9, pp. 1353- 1357 ,(1991) , 10.1116/1.585195
M. Allegrini, C. Ascoli, P. Baschieri, F. Dinelli, C. Frediani, A. Lio, T. Mariani, Laser thermal effects on atomic force microscope cantilevers Ultramicroscopy. ,vol. 42, pp. 371- 378 ,(1992) , 10.1016/0304-3991(92)90295-U
N. Umeda, Scanning attractive force microscope using photothermal vibration Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. ,vol. 9, pp. 1318- 1322 ,(1991) , 10.1116/1.585187
D. Rugar, H. J. Mamin, P. Guethner, S. E. Lambert, J. E. Stern, I. McFadyen, T. Yogi, Magnetic force microscopy: General principles and application to longitudinal recording media Journal of Applied Physics. ,vol. 68, pp. 1169- 1183 ,(1990) , 10.1063/1.346713
T. R. Albrecht, P. Grütter, D. Horne, D. Rugar, Frequency modulation detection using high‐Q cantilevers for enhanced force microscope sensitivity Journal of Applied Physics. ,vol. 69, pp. 668- 673 ,(1991) , 10.1063/1.347347
S. Alexander, L. Hellemans, O. Marti, J. Schneir, V. Elings, P. K. Hansma, Matt Longmire, John Gurley, An atomic-resolution atomic-force microscope implemented using an optical lever Journal of Applied Physics. ,vol. 65, pp. 164- 167 ,(1989) , 10.1063/1.342563
Gabi Neubauer, Sidney R. Cohen, Gary M. McClelland, Don Horne, C. Mathew Mate, Force microscopy with a bidirectional capacitance sensor Review of Scientific Instruments. ,vol. 61, pp. 2296- 2308 ,(1990) , 10.1063/1.1141354
Y. Martin, C. C. Williams, H. K. Wickramasinghe, Atomic force microscope–force mapping and profiling on a sub 100‐Å scale Journal of Applied Physics. ,vol. 61, pp. 4723- 4729 ,(1987) , 10.1063/1.338807