Electrical Conduction Through Anodic Oxides on Sulfur Passivated InP

摘要: The electrical characteristics of anodic oxides on sulfur-passivated InP were investigated. effects passivation and subsequent rapid thermal annealing the oxide included reduction in fixed charge density, increases both breakdown voltage resistivity. permittivity conductivity also influenced by passivation. A model based changes structure is proposed to explain results. According this model, a reaction takes place between sulfur atoms oxygen In 2 O 3 which results an increase P 5 /In ratio modification