Synthesis of ultra-thin carbon layers on SiC substrate by ion implantation
作者： Xu Wang , Yanwen Zhang , Meixiong Tang , Dong Han , Engang Fu
DOI: 10.1016/J.CARBON.2015.05.046
关键词: Carbon 、 Graphene 、 Chemical engineering 、 Ion implantation 、 Substrate (electronics) 、 Materials science 、 Monolayer 、 Ion 、 Nanotechnology 、 Thermal decomposition 、 Carbide
摘要: … films on insulating/semiconducting substrates are desirable for future nanoelectronics. In this work, ion implantation technique is used to produce ultra-thin … by the substrate, segregate to …
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