Frequency and temperature compensation synthesis for a MEMS resonator

作者: Kenneth R. Cioffi , Didier Lacroix

DOI:

关键词: OptoelectronicsCalibrationElectronic engineeringSignalCompensation (engineering)FabricationMicroelectromechanical systemsResonatorEngineering

摘要: Disclosed herein is a signal generation technique based on reference frequency provided by MEMS resonator. The compensates for temperature- and fabrication process-induced variations collectively. In some embodiments, device implementing the disclosed includes fractional-N synthesizer, temperature sensor, calibration data, sigma-delta modulator to adjust of resonator desired value while compensating variation

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