VHF free-free beam high-Q micromechanical resonators
作者： Kun Wang , Yinglei Yu , Ark-Chew Wong , C.T.-C. Nguyen
DOI: 10.1109/MEMSYS.1999.746871
关键词:
摘要: Free-free beam, flexural-mode, micromechanical resonators utilizing non-intrusive supports to achieve measured Q's as high 8,400 at VHF frequencies from 30-90 MHz are demonstrated in a polysilicon surface micromachining technology. The subject microresonators feature torsional-mode support springs that effectively isolate the resonator beam its anchors via quarter-wavelength impedance transformations, minimizing anchor dissipation and allowing these Q with stiffness frequency range.
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