Development of a multi-agent-based distributed simulation platform for semiconductor manufacturing
作者： Jie Lin , Qingqi Long
DOI: 10.1016/J.ESWA.2010.10.035
关键词: Real-time computing 、 Semiconductor device fabrication 、 Complex system 、 Graphical user interface 、 Computer science 、 Distributed Computing Environment 、 JADE (programming language) 、 Distributed computing 、 Process development execution system 、 Computer-integrated manufacturing 、 Multi-agent system
摘要: Since the semiconductor manufacturing system is a large-scale complex system, it difficult to solve problems in by mathematical modeling method. This paper presents multi-agent-based distributed simulation platform support extremely analysis. A framework and multi-agent collaborative control model are proposed provide flexible infrastructure coordination mechanism environment for simulation. time synchronization designed keep events correct logical order steps of given. An interaction message formats presented describe how agents communicate with each other The development design graphical user interface also exploited this paper. Finally, evaluation was illustrated case study. It indicates that effective simulating provides insights about improve process well targeted measures.
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