Emerging challenges of microactuators for nanoscale positioning, assembly, and manipulation

摘要: The development of manufacturing tools and processes capable precisely positioning manipulating nanoscale components materials is still in its embryonic stage. Microactuators are emerging as important materials. This paper provides a summary the state-of the-art design, fabrication, application microactuators for assembly. Key characteristics design models electrothermal electrostatic described compared. Specific requirements their functionality at discussed. results demonstrate limitations existing microactuator designs key challenges associated with modeling, performance characterization positioning, assembly, manipulation.