Extending the travel range of analog-tuned electrostatic actuators
作者： E.S. Hung , S.D. Senturia
DOI: 10.1109/84.809065
关键词:
摘要: … The leveraged bending effect can be used to achieve full gap travel at the cost of increased … An analytical approximation shows that the strainstiffening effect can be used to achieve a …
sci-hub.se 参考文章(12)
M. B. Sinclair, M. A. Butler, S. H. Kravitz, W. J. Zubrzycki, A. J. Ricco, Synthetic infrared spectra. Optics Letters. ,vol. 22, pp. 1036- 1038 ,(1997) , 10.1364/OL.22.001036
David M. Burns, Victor M. Bright, Nonlinear flexures for stable deflection of an electrostatically actuated micromirror Proceedings of SPIE. ,vol. 3226, pp. 125- 136 ,(1997) , 10.1117/12.284560
P.B. Chu, S.J. Pister, Analysis of closed-loop control of parallel-plate electrostatic microgrippers international conference on robotics and automation. pp. 820- 825 ,(1994) , 10.1109/ROBOT.1994.351387
P.M. Osterberg, S.D. Senturia, M-TEST: A test chip for MEMS material property measurement using electrostatically actuated test structures IEEE\/ASME Journal of Microelectromechanical Systems. ,vol. 6, pp. 107- 118 ,(1997) , 10.1109/84.585788
Raymond Jefferson Roark, Warren C Young, Roark's Formulas for Stress and Strain ,(1938)
J.I. Seeger, S.B. Crary, Stabilization of electrostatically actuated mechanical devices Sensors. ,vol. 2, pp. 1133- 1136 ,(1997) , 10.1109/SENSOR.1997.635402
William C Tang, Tu-Cuong H Nguyen, Roger T Howe, None, Laterally Driven Polysilicon Resonant Microstructures Sensors and Actuators. ,vol. 20, pp. 25- 32 ,(1989) , 10.1016/0250-6874(89)87098-2
Elmer S Hung, Positioning, control, and dynamics of electrostatic actuators for use in optical and RF systems Massachusetts Institute of Technology. ,(1998)
E.S. Hung, S.D. Senturia, Leveraged Bending for Full-Gap Positioning with Electrostatic Actuation 1998 Solid-State, Actuators, and Microsystems Workshop Technical Digest. ,(1998) , 10.31438/TRF.HH1998.19
Peter Maynard Osterberg, Electrostatically actuated microelectromechanical test structures for material property measurement Massachusetts Institute of Technology. ,(1995)