Far-infrared microbolometer detectors
作者： D. P. Neikirk , Wayne W. Lam , D. B. Rutledge
DOI: 10.1007/BF01009656
关键词: Bolometer 、 Integrated circuit 、 Materials science 、 Fabrication 、 Microbolometer 、 Detector 、 Particle detector 、 Optics 、 Far infrared 、 Miniaturization 、 Optoelectronics
摘要: The bismuth microbolometer is a simple, easily made detector suitable for use throughout the far-infrared, which has been integrated with variety of planar antennas. general thermal properties these devices and some constraints on bolometer materials are discussed. fabrication performance several different types microbolometers microthermocouples described.
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