Self‐heated thermocouples for far‐infrared detection
作者： Dean P. Neikirk , David B. Rutledge
DOI: 10.1063/1.93554
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摘要: A novel self-heated Bi-Sb thermocouple for far-infrared detection has been developed. The detector is suitable integration with monolithic antennas and imaging arrays. device fabricated in a single photolithography masking step using photoresist-bridge technique. This bridge technique also used to make microbolometers lower 1/f noise than those made by two conventional steps. thermocouples have equivalent power (NEP) of 7×10^−10 W/(√Hz) 3-dB frequency response 150 kHz.
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