Coating hardness effect on the critical number of friction cycles for wear particle generation in carbon nitride coatings

摘要: Wear particle generation in carbon nitride coatings by a spherical diamond counterpart repeated sliding contacts has been studied with an emphasis on the effect of coating hardness, through varying two nitrogen incorporation conditions ion acceleration energy (I.A.E.) and current density (I.C.D.). With pin-on-disk type apparatus installed chamber environmental scanning electron microscope (E-SEM), motivation this paper is to show direct evidence when where wear particles non-conductive deposited onto silicon substrates do generate under controllable relative humidity, rather than infer that how occur from post-testing observation. Based situ examination, shape transition maps for generated have obtained various conditions. The results critical number friction cycles, Nc, detecting cluster observed be generally decreasing increase both density. However, seems somewhat bigger density, not only but also characteristics, such as surface roughness, nano-indentation hardness internal stress. It found further showing linearly increasing behavior which determined during beam assisted deposition process.