Friction studies of ion beam assisted carbon nitride coating sliding against diamond pin in water vapor

摘要: Amorphous carbon nitride coating of thickness 500 nm was deposited onto single crystal silicon using an ion beam assisted deposition method (IBM). Both the friction coefficient and process amorphous sliding against diamond pin were measured with a pin-on-disk tribotester in situ observed environmental scanning electron microscope (E-SEM), respectively. In tests, gave initial 0.02, rising to around 0.08 when normal load consecutively changed from 10 until 150 mN at fixed speed μm/s. However, increasing tendency coefficients can also be relative humidities varied by up about 80%. The Bowden-Tabor model is shown not exactly accordance for plastic deformation regime, although adhesion no regime still needs further studies.