Imaging the irradiance distribution in the optical near field

作者: J. Aizenberg , J. A. Rogers , K. E. Paul , G. M. Whitesides

DOI: 10.1063/1.120502

关键词: OptoelectronicsIrradianceDistribution (mathematics)PhotoresistFabricationMaterials scienceIntensity (heat transfer)OpticsDiffractionNear and far fieldContrast (vision)

摘要: This letter describes the use of a sensitive photoresist for direct imaging optical intensity profiles in near-field photolithographic experiments. A comparison between experimental patterns exposed, developed and calculated shows that this procedure provides reliable semiquantitative image irradiance distribution near field; experiment theory correlate adequately. potential superficial diffraction contrast recorded as basis new method fabrication nanostructures is discussed.

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