Functional film, liquid immersion member, method of manufacturing liquid immersion member, exposure apparatus, and device manufacturing method
作者： Yusuke Taki , Tsukasa Kishiume
DOI:
关键词: Immersion (virtual reality) 、 Materials science 、 Amorphous carbon 、 Composite material 、 Engineering drawing
摘要: A functional film which is applied to a surface of base material includes Ti-doped tetrahedral amorphous carbon (ta-C:Ti film).
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