Slit valve door
作者： Fred Freerks
DOI:
关键词: Seal (mechanical) 、 Insert (composites) 、 Dovetail joint 、 Groove (joinery) 、 Aperture 、 Acoustics 、 Slit 、 Structural engineering 、 Geology
摘要: An improved slit valve door for sealing an aperture in the wall of a semiconductor process chamber. The consists cover plate with recess it receiving removable insert. O-ring seal is placed over insert, and when insert plate, moves into seat plate. As seats secured to by means screws protruding from floor recess, dovetail groove formed which retains O-ring.
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