Vacuum chamber slit valve

作者: Masato Toshima

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摘要: A slit valve for sealing an access opening in a vacuum chamber. The body or door is pivotally mounted adjacent the and has pair of cam blocks at its opposite ends. Cam follower rollers are on swing arm reversible pivotal closing movement effected by pneumatic cylinder. During arm, followers engage block resiliently pivot against opening. Upon reversed, movement, release from block, allowing spring to return normally opened position. mounting adapted provide equal compressive sealing, both top-to-bottom side-to-side.

参考文章(2)
Gabriel Onorio, Billy W. Ward, Nicholas Guarino, Evacuable chamber enclosing ,(1986)
Helmut Henschenmacher, Karl-Heinz Ecker, Manipulator for cover closure members ,(1986)