Fs-laser based hybrid micromachining for polymer micro-opto electrical systems
作者： Gian-Luca Roth , Julian Haubner , Stefan Kefer , Cemal Esen , Ralf Hellmann
DOI: 10.1016/J.OPTLASENG.2020.106362
关键词: Materials science 、 Microheater 、 Femtosecond 、 Optoelectronics 、 Laser 、 Fabrication 、 Surface micromachining 、 Electrical conductor 、 Fiber Bragg grating 、 Cyclic olefin copolymer
摘要: Abstract We report on femtosecond laser direct writing of electrically conductive copper structures transparent cyclic olefin copolymer based planar optical chips. The process is a laser-induced reduction CuO nanoparticles dissolved in water-soluble resin. Thus generated are characterized with respect to their chemical composition and electrical resistivity. In addition, the application ultrashort pulses enables hybrid micromachining approach comprising ablation polymer substrates fabrication patterns single processing setup. A possible electro-optical this demonstrated by employing as an electro-thermal microheater combination Bragg grating sensor. This, turn, highlights potential generating copious micro-opto-electro-mechanical for numerous sensing applications ranging from Lab-on-Chip environmental using presented approach.
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