SUBSTRATE PROCESSING APPARATUS
作者： Kimura Atsuo , Shiyoumori Hirobumi
DOI:
关键词: Substrate (printing) 、 Port (circuit theory) 、 Acoustics 、 Materials science
摘要: PROBLEM TO BE SOLVED: To provide a substrate processing apparatus capable of plurality substrates which are disposed at predetermined intervals, with higher uniformity among the substrates.SOLUTION: The comprises: tub 12 in liquid is stored and 24 intervals processed; flow passage 14a circulated thickness direction 12; first second discharge parts 14band 14bincluding openings 15 formed along distal end faces 16, 16closing 14a; supply path 18 supplies to part proximal ends 14bof includes port 20. A length from 20 face 16of 14bis substantially equal 14b.SELECTED DRAWING: Figure 1
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