Optical and mechanical characteristics of nanocrystalline boron carbonitride films synthesized by plasma-assisted physical vapor deposition
作者： Z. X. Cao , H. Oechsner
DOI: 10.1063/1.1529990
关键词: Physical vapor deposition 、 Ternary operation 、 Photoluminescence 、 Materials science 、 Vickers hardness test 、 Nanocrystalline material 、 Transmission electron microscopy 、 Analytical chemistry 、 Chemical vapor deposition 、 Thin film 、 General Physics and Astronomy
摘要: Nanocrystalline boron carbonitride thin films were prepared using the electron-cyclotron- wave-resonance plasma-assisted deposition, whereby energy for precursor ions was adjusted between 70 and 180 eV. Fourier-transform infrared spectroscopy confirmed presence of ternary sp3-bonded structure high-resolution transmission electron microscopy revealed a punctured lattice. The deposits unfold grains about 200 nm in dimension under atomic force microscope, yet they exhibit extremely flat surfaces with root-mean-square roughness less than 3 nm. For 1.2 μm thick film, transmittance visible light range is as high 80%. Vicker’s hardness measures over 28 GPa. Therefore, this material competitive to nanocrystalline diamond application protective coatings optical components. Remarkably, also very strong photoluminescence peaked at 430 detected as-deposited room temperature.
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