Synthesis and characterization of a photosensitive organic–inorganic, hybrid positive resin type material: application to the manufacture of microfluidic devices by laser writing

作者: Elias Mechref , Jihane Jabbour , Sylvie Calas-Etienne , Kassem Amro , Ahmad Mehdi

DOI: 10.1039/C5RA21393B

关键词: Hybrid materialFourier transform infrared spectroscopyMaterials scienceBenzeneChemical engineeringPolymerAlkoxy groupPolymer chemistryAqueous solutionVinyl etherDissolution

摘要: A positive working and chemical amplified photosensitive organic–inorganic hybrid material based on PAA polymer with a lower molecular weight, 1,3,5-tris[(2-vinyloxy)ethoxy]benzene (TVEB) as crosslinking dissolution inhibitor, VEPTES pre-hydrolysed an PAG photoacid generator was developed. The TVEB prepared by coupling 1,3,5-trihydroxybenzene 2-chloroethyl vinyl ether. showed sensitivity when exposed to UV light at 375 nm followed development 2.38 wt% aqueous solution of TMAH room temperature. synthesis the FTIR spectroscopy follow ether group from carboxylic polymer.

参考文章(34)
Norman B. Colthup, Lawrence H. Daly, Stephen E. Wiberley, Introduction to Infrared and Raman Spectroscopy ,(1964)
Richard Murdey, J. Todd Stuckless, Calorimetry of Polymer Metallization: Copper, Calcium, and Chromium on PMDA-ODA Polyimide Journal of the American Chemical Society. ,vol. 125, pp. 3995- 3998 ,(2003) , 10.1021/JA028829W
Seongyun Moon, Koji Kamenosono, Syunichi Kondo, Akira Umehara, Tsuguo Yamaoka, Three-Component Photopolymers Based on Thermal Crosslinking and Acidolytic De-Crosslinking of Vinyl Ether Groups. Effects of Binder Polymers on Photopolymer Characteristics Chemistry of Materials. ,vol. 6, pp. 1854- 1860 ,(1994) , 10.1021/CM00046A047
Miloš Svoboda, Walter Schrott, Zdeněk Slouka, Michal Přibyl, Dalimil Šnita, Plastic microfluidic systems made by imprinting against an epoxy stamp Microelectronic Engineering. ,vol. 87, pp. 1527- 1530 ,(2010) , 10.1016/J.MEE.2009.11.035
K H Becker, K H Schoenbach, J G Eden, Microplasmas and applications Journal of Physics D. ,vol. 39, ,(2006) , 10.1088/0022-3727/39/3/R01
Zi-Kang Zhu, Yong Yang, Jie Yin, Zong-Neng Qi, Preparation and properties of Organosoluble polyimide/ silica hybrid materials by sol-gel process Journal of Applied Polymer Science. ,vol. 73, pp. 2977- 2984 ,(1999) , 10.1002/(SICI)1097-4628(19990929)73:14<2977::AID-APP22>3.0.CO;2-J
Shaikh Md. Mominul Alam, Tarek Agag, Takehiro Kawauchi, Tsutomu Takeichi, Organic–inorganic hybrids containing polyimide, organically modified clay and in situ formed polydimethylsiloxane Reactive & Functional Polymers. ,vol. 67, pp. 1218- 1224 ,(2007) , 10.1016/J.REACTFUNCTPOLYM.2007.07.003
F.Y Tsai, D.R Harding, S.H Chen, T.N Blanton, High-Permeability Fluorinated Polyimide Microcapsules by Vapor-Deposition Polymerization Polymer. ,vol. 44, pp. 995- 1001 ,(2003) , 10.1016/S0032-3861(02)00787-5