作者: Elias Mechref , Jihane Jabbour , Sylvie Calas-Etienne , Kassem Amro , Ahmad Mehdi
DOI: 10.1039/C5RA21393B
关键词: Hybrid material 、 Fourier transform infrared spectroscopy 、 Materials science 、 Benzene 、 Chemical engineering 、 Polymer 、 Alkoxy group 、 Polymer chemistry 、 Aqueous solution 、 Vinyl ether 、 Dissolution
摘要: A positive working and chemical amplified photosensitive organic–inorganic hybrid material based on PAA polymer with a lower molecular weight, 1,3,5-tris[(2-vinyloxy)ethoxy]benzene (TVEB) as crosslinking dissolution inhibitor, VEPTES pre-hydrolysed an PAG photoacid generator was developed. The TVEB prepared by coupling 1,3,5-trihydroxybenzene 2-chloroethyl vinyl ether. showed sensitivity when exposed to UV light at 375 nm followed development 2.38 wt% aqueous solution of TMAH room temperature. synthesis the FTIR spectroscopy follow ether group from carboxylic polymer.