Enhanced electrical characteristics of sol–gel-derived amorphous SrTiO3 films
作者： Manwen Yao , Fei Li , Yong Peng , Jianwen Chen , Zhen Su
DOI: 10.1007/S10854-016-6018-8
关键词: Sol-gel 、 Amorphous solid 、 Analytical chemistry 、 Aluminium 、 Absorption band 、 X-ray photoelectron spectroscopy 、 Thin film 、 Electrode 、 Materials science 、 Fourier transform infrared spectroscopy 、 Nanotechnology 、 Electrical and Electronic Engineering 、 Atomic and Molecular Physics, and Optics 、 Electronic, Optical and Magnetic Materials 、 Condensed matter physics
摘要: Amorphous SrTiO3 thin films were fabricated on Pt (100)/Ti/SiO2/Si substrates by sol–gel and spin-coating technology their surface cross-section morphology characterized using field emission scanning electron microscopy. A broad absorption band at about 3390 cm−1 owing to the stretching vibrations of hydroxyl groups in absorbed water was observed from fourier transform infrared spectroscopy. J–E measurements used investigate electrical characteristics films. The breakdown leakage current are strongly dependent upon electrode materials. with Al top electrodes exhibit significantly higher strength much lower than those Au electrodes. Moreover, samples distinct when a negative voltage applied under different testing conditions. chemical state aluminum analyzed X-ray photoelectron spectroscopy, indicating that 45 nm thick completely transformed into oxide layer positive applied. These results show anodic oxidation is suggested be responsible for enhanced
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