Beam homogenizer for hollow-fiber delivery system of excimer laser light.
作者： Yuji Matsuura , Daisuke Akiyama , Mitsunobu Miyagi
DOI: 10.1364/AO.42.003505
关键词: Laser beam quality 、 Optics 、 Beam homogenizer 、 Optoelectronics 、 Beam expander 、 Waveguide (optics) 、 Fiber laser 、 Lens (optics) 、 Beam (structure) 、 Materials science 、 Laser
摘要: A beam homogenizer for a hollow-fiber-based, UV laser delivery system is proposed. rectangular glass waveguide with an inner aluminum coating that has 1-mm square cross section attached at the output end of circular-core hollow fiber diameter. The generates number higher-order modes and results in uniform top-hat profile. configuration designed by ray-tracing technique so both low transmission loss high uniformity are obtained. fabricated shows 0.4 dB, intensity variation coefficient 7%. from expanded lens to size larger than 10-mm square. It also shown profile does not change bending condition.
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