Delivery of F2-excimer laser light by aluminum hollow fibers.
作者： Yuji Matsuura , Takashi Yamamoto , Mitsunobu Miyagi
DOI: 10.1364/OE.6.000257
关键词: Composite material 、 Fiber laser 、 Tube (fluid conveyance) 、 Chemical vapor deposition 、 Inert gas 、 Excimer laser 、 Fiber 、 Substrate (electronics) 、 Optics 、 Optical fiber 、 Materials science
摘要: A hollow fiber composed of a glass-tube substrate and an aluminum thin film coated upon the inside tube delivers F2-excimer laser light. smooth, was deposited by using metal-organic chemical vapor deposition dimethylethylamine:alane (DMEAA) as precursor. It shown that transmission loss with 1.0-mm inner diameter low 0.5 dB/m for when bore is pressurized inert gas to remove absorption air. When bent at radius 30 cm, additional 1.6 dB.
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