The nitridation of thick germanium oxide films on single-crystal germanium

摘要: The far-infrared (FIR) transmission properties and index of refraction thick ( about 2000 A) vitreous germanium oxide films on single-crystal have been measured before after high temperature reaction with flowing ammonia gas. Significant shifts in the spectra were observed as a function both time NH/sub 3/ flow rate. Correlation was minima reported literature for fine powders nitride thin (<1000A) layers ion-implanted annealed germanium/oxygen germanium/ nitrogen complexes. In addition, when nitrided reoxidized at pressure, structure which corresponded to FIR hexagonal-phase GeO/sub 2/ powder specimens.