Two-step sharpening process for silicon probe in quartz-based atomic force microscopy sensor
作者： Takashi Ichii , Nobumasa Tagai , Kohei Omori , Tatsunori Uchida , Toru Utsunomiya
关键词: Silicon 、 Mica 、 Analytical chemistry 、 Optoelectronics 、 Non-contact atomic force microscopy 、 Radius 、 Quartz 、 Sharpening 、 Frequency modulation 、 Aqueous solution 、 Materials science
摘要: A two-step sharpening process for a Si pillar in quartz tuning fork sensor was developed use frequency modulation atomic force microscopy (FM-AFM). By combining electrochemical etching HF solution and anisotropic KOH solution, the tip radius decreased to 120 nm. The Si-probe-attached showed higher resonance than tungsten-probe attached sensor, which would lead sensitivity. We demonstrated FM-AFM imaging on cleaved mica surface aqueous by using fabricated resolution successfully achieved.
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