OPTICAL MEMS TECHNOLOGIES FOR ELECTRICALLY TUNABLE MULTI-SPECTRAL SHORT-WAVE INFRARED SENSORS AND ARRAYS
作者： JASON S. MILNE , JOHN M. DELL , ADRIAN J. KEATING , LORENZO FARAONE
DOI: 10.1142/S0129156408005989
关键词: Broadband 、 Optoelectronics 、 Electronic engineering 、 Computer science 、 Context (language use) 、 Micro-Opto-Electro-Mechanical Systems 、 Short wave infrared 、 Infrared 、 Microelectromechanical systems 、 Multi spectral 、 Fabry–Pérot interferometer
摘要: Optical MEMS technology combined with broadband infrared sensor is used to realize wavelength-tunable sensors. This paper describes the ongoing research into one such design based on an electrically tunable Fabry-Perot cavity. Theory, measured results and future directions are presented discussed for single-sensor currently being developed, in context of intended application this technology; development lightweight, portable robust multi-spectral imaging systems.
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