Extending the tuning range of SWIR microspectrometers

摘要: We have developed a microspectrometer based on monolithic integration of Fabry-Perot optical filter directly with a Hg x Cd 1-x Te-based infrared detector. The tunable is created by parallel plate MEMS fabricated from two dielectric mirror stacks separated an initial air gap 1.4 μm. measured linewidths as low 55 nm, switching times 40 μs and tuning range 380 nm. However this corresponds to only 42% the desired tuning range, 1.6-2.5 μm (900 nm). limited process called "snap down" which occurs when drive voltage source. It can be shown that for snap down occurs at 1/3 the initial gap; complete across SWIR band requires physical deflection least 60% gap. have developed modified actuator design allows moveable mirror. Further, method minimizes actuation-induced stress gradients lead substantial bowing subsequently broad optical linewidths. will compare results our current new extended designs. These designs are Coventorware analytical mechanical models combined Fabry- Perot.