The prospects of a subnanometer focused neon ion beam.
作者： F. H. M. Rahman , Shawn McVey , Louis Farkas , John A. Notte , Shida Tan
DOI: 10.1002/SCA.20268
关键词: Field ion microscope 、 Ion milling machine 、 Focused ion beam 、 Ion source 、 Ion beam 、 Optics 、 Atomic physics 、 Neon 、 Ion beam deposition 、 Chemistry 、 Beam (structure)
摘要: Summary The success of the helium ion microscope has encouraged extensions this technology to produce beams other species. A review various candidate and their technical prospects suggest that a neon beam might be most readily achieved. Such would provide sputtering yield exceeds by an order magnitude while still offering theoretical probe size less than 1-nm. This article outlines motivation for gas field source, expected performance through simulations, provides update our experimental progress. SCANNING 33: 129–134, 2012. © 2011 Wiley Periodicals, Inc.
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