High reflectivity and broad bandwidth AlN/GaN distributed Bragg reflectors grown by molecular-beam epitaxy

作者: H. M. Ng , T. D. Moustakas , S. N. G. Chu

DOI: 10.1063/1.126483

关键词: OptoelectronicsOpticsElectron cyclotron resonanceTransmission electron microscopyDistributed Bragg reflector laserEpitaxyWavelengthSemiconductor laser theoryMolecular beam epitaxyMaterials scienceSapphire

摘要: A number of distributed Bragg reflectors (DBRs) based on AlN/GaN quarterwave layers have been grown (0001) sapphire by electron cyclotron resonance plasma-assisted molecular-beam epitaxy. The periods for the DBRs ranges from 20.5 to 25.5 and thickness were chosen such that peak reflectance occurs near ultraviolet green wavelength regions. Peak values between 97% 99% obtained these DBRs. best sample has a up centered at 467 nm with bandwidth 45 nm. experimental data this compared simulations using transmission matrix method show excellent agreement respect reflectance, high locations sidelobes. uniform periodicity bilayers confirmed cross-section microscopy. network cracks was observed in some samples a...

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