Deposition of Sm2O3 doped CeO2 thin films from Ce(DPM)4 and Sm(DPM)3 (DPM=2,2,6,6-tetramethyl-3,5-heptanedionato) by aerosol-assisted metal organic chemical vapor deposition
作者： Yinzhu Jiang , Haizheng Song , Qianli Ma , Guangyao Meng
DOI: 10.1016/J.TSF.2005.12.184
关键词: Crystallization 、 Analytical chemistry 、 Differential thermal analysis 、 Deposition (phase transition) 、 Thermogravimetry 、 Metalorganic vapour phase epitaxy 、 Chemistry 、 Substrate (chemistry) 、 Inorganic chemistry 、 Chemical vapor deposition 、 Thin film
摘要: Abstract Samarium-doped ceria (SDC) thin films were prepared from Sm(DPM)3 (DPM = 2,2,6,6-tetramethyl-3,5-heptanedionato) and Ce(DPM)4 using the aerosol-assisted metal–organic chemical vapor deposition method. α-Al2O3 NiO-YSZ (YSZ = Y2O3-stabilized ZrO2) disks chosen as substrates in order to investigate difference growth process on two substrates. Single cubic structure could be obtained either or at temperatures above 450 °C; similar between YSZ SDC results matching compared with substrate. A typical columnar 650 °C substrate a more uniform surface was produced 500 °C. The composition of film deposited is close that precursor solution (Sm : Ce = 1 : 4), higher lower temperature will both lead sharp deviation this elemental ratio. different thermal properties may key reason for variation increase temperature.
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