Formation of MgO films by ultrasonic spray pyrolysis from β-diketonate
作者： O Stryckmans , T Segato , P.H Duvigneaud
DOI: 10.1016/0040-6090(95)08154-2
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摘要: Abstract Chemical vapor deposition (CVD) from an aerosol generated by ultrasonic atomization was used to grow magnesium oxide films on alumina polycrystalline substrates. The precursor a solution of acetylacetonate (Mg(acac) 2 ) in isopropanol. decomposition the salt studied determine CVD temperature range. Thermal analysis thermogravimetry, differential scanning calorimetry and IR mass spectrometry enabled model be determined. Above melting at 265°C, Mg(acac) is no longer stable. molecule splits giving, one hand, gaseous organic residue and, other, liquid (MgC 5 H 6 O which turn gives rise MgO 450°C. film presents smooth microstructure highly preferentially oriented structure with (200) planes parallel substrate surface about 400°C. thickness obtained reaches 10 μm, represents effective diffusion barrier for thick containing alkaline earth elements.
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sci-hub.se 参考文章(20)
Interfaces in new materials Elsevier Applied Science. ,(1991) , 10.1007/978-94-011-3680-8
H. Nakajima, S. Yamaguchi, K. Iwasaki, H. Morita, H. Fujimori, Y. Fujino, Interdiffusion and interfacial reaction between an YBa2Cu3Oxthin film and substrates Applied Physics Letters. ,vol. 53, pp. 1437- 1439 ,(1988) , 10.1063/1.100460
A. Tiburcio-Silver, J.C. Joubert, M. Labeau, Études sur la croissance, la structure et la composition de couches minces de ZnO et ZnO dopé a l'indium, obtenues par procédé pyrosol Thin Solid Films. ,vol. 197, pp. 195- 214 ,(1991) , 10.1016/0040-6090(91)90232-M
J. Bloem, Y.S. Oei, H.H.C. De Moor, J.H.L. Hanssen, L.J. Giling, Near equilibrium growth of silicon by CVD I. The Si-Cl-H system Journal of Crystal Growth. ,vol. 65, pp. 399- 405 ,(1983) , 10.1016/0022-0248(83)90080-5
M. O. Aboelfotoh, K. C. Park, W. A. Pliskin, Infrared and high‐energy electron diffraction analyses of electron‐beam‐evaporated MgO films Journal of Applied Physics. ,vol. 48, pp. 2910- 2917 ,(1977) , 10.1063/1.324102
C.H.J. Van den Brekel, A.K. Jansen, Morphological stability analysis in chemical vapour deposition processes. II Journal of Crystal Growth. ,vol. 43, pp. 364- 370 ,(1978) , 10.1016/0022-0248(78)90395-0
C. S. Chern, J. Zhao, Y. Q. Li, P. Norris, B. Kear, B. Gallois, Insitugrowth of YBa2Cu3O7−xhighTcsuperconducting thin films directly on sapphire by plasma‐enhanced metalorganic chemical vapor deposition Applied Physics Letters. ,vol. 57, pp. 721- 723 ,(1990) , 10.1063/1.104258
Rao R. Tummala, Ceramic and Glass‐Ceramic Packaging in the 1990s Journal of the American Ceramic Society. ,vol. 74, pp. 895- 908 ,(1991) , 10.1111/J.1151-2916.1991.TB04320.X
Gary L. Messing, Shi-Chang Zhang, Gopal V. Jayanthi, Ceramic Powder Synthesis by Spray Pyrolysis Journal of the American Ceramic Society. ,vol. 76, pp. 2707- 2726 ,(1993) , 10.1111/J.1151-2916.1993.TB04007.X
C. T. Cheung, E. Ruckenstein, Superconductor-substrate interactions of the Y–Ba–Cu oxide Journal of Materials Research. ,vol. 4, pp. 1- 15 ,(1989) , 10.1557/JMR.1989.0001