Analytical modeling for determination of pull-in voltage for an electrostatic actuated MEMS cantilever beam
作者： Leow Cheah Wei , A.B. Mohammad , N.M. Kassim
DOI: 10.1109/SMELEC.2002.1217814
关键词: Curvature 、 Residual stress 、 Pull in voltage 、 Cantilever 、 Beam (structure) 、 Work (thermodynamics) 、 Voltage 、 Microelectromechanical systems 、 Acoustics 、 Materials science
摘要: A new analytical model has been developed for determining the pull-in voltage of an electrostatic actuated microelectromechanical system (MEMS) cantilever beam. The takes into account beam curvature caused by residual stress or gradient in material. It can be used to straight, curled and with mixture straight sections. Modeling result compared published work other researchers as well experimental measurement this is found accurate.
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