Characterization and modeling of electrostatically actuated polysilicon micromechanical devices
作者： Edward Keat Leem Chan
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harvard.edu参考文章(73)
Gupta, Raj K., Ph. D., Electrostatic pull-in test structure design for in-situ mechanical property measurements of microelectromechanical systems (MEMS) Massachusetts Institute of Technology. ,(1997)
B.E. Artz, L.W. Cathey, A finite element method for determining structural displacements resulting from electrostatic forces Technical Digest IEEE Solid-State Sensor and Actuator Workshop. pp. 190- 193 ,(1992) , 10.1109/SOLSEN.1992.228295
Peter Maynard Osterberg, Electrostatically actuated microelectromechanical test structures for material property measurement Massachusetts Institute of Technology. ,(1995)
Guido Cornella, Monotonic and cyclic testing of thin film materials for MEMS applications ,(1999)
T.A. Lober, J. Huang, M.A. Schmidt, S.D. Senturia, Characterization of the mechanisms producing bending moments in polysilicon micro-cantilever beams by interferometric deflection measurements IEEE Technical Digest on Solid-State Sensor and Actuator Workshop. pp. 92- 95 ,(1988) , 10.1109/SOLSEN.1988.26441
T.A. Lober, R.T. Howe, Surface-micromachining processes for electrostatic microactuator fabrication IEEE Technical Digest on Solid-State Sensor and Actuator Workshop. pp. 59- 62 ,(1988) , 10.1109/SOLSEN.1988.26433
B.P. van Drieënhuizen, J.F.L. Goosen, P.J. French, R.F. Wolffenbuttel, Comparison of techniques for measuring both compressive and tensile stress in thin films Sensors and Actuators A: Physical. ,vol. 37-38, pp. 756- 765 ,(1993) , 10.1016/0924-4247(93)80128-4
M S Benrakkad, M A Benitez, J Esteve, J M Lopez-Villegas, J Samitier, J R Morante, Stress measurement by microRaman spectroscopy of polycrystalline silicon structures Journal of Micromechanics and Microengineering. ,vol. 5, pp. 132- 135 ,(1995) , 10.1088/0960-1317/5/2/019
William N Sharpe Jr, Ranji Vaidyanathan, Bin Yuan, Gang Bao, Richard L Edwards, Effect of etch holes on the mechanical properties of polysilicon Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. ,vol. 15, pp. 1599- 1603 ,(1997) , 10.1116/1.589554
N.R Aluru, J White, An efficient numerical technique for electrochemical simulation of complicated microelectromechanical structures Sensors and Actuators A-physical. ,vol. 58, pp. 1- 11 ,(1997) , 10.1016/S0924-4247(97)80218-X