An efficient numerical technique for electrochemical simulation of complicated microelectromechanical structures
作者： N.R Aluru , J White
DOI: 10.1016/S0924-4247(97)80218-X
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摘要: Abstract An efficient algorithm for self-consistent analysis of three-dimensional (3-D) microelectromechanical systems (MEMS) is described. The employs a hybrid finite-element/boundary-element technique coupled mechanical and electrical analysis. nonlinear equations are solved by employing Newton-GMRES technique. shown to converge rapidly much faster than relaxation tightly cases.
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