Local surface modification of aluminum by laser irradiation

作者: T. Kikuchi , S.Z. Chu , S. Jonishi , M. Sakairi , H. Takahashi

DOI: 10.1016/S0013-4686(01)00552-7

关键词: LaserMetallurgyElectroplatingIrradiationMaterials scienceOptoelectronicsAnodizingFabricationElectrophoretic depositionIsotropic etchingSurface modification

摘要: A novel method involving a combination of pulsed YAG laser irradiation and electrochemistry for chemical physical modification aluminum surface at selected area is reviewed. Local metal deposition carried out by successive steps anodizing, irradiation, electroplating (or electroless plating), the fabrication prototype printed circuit boards attempted. organic film with electrophoretic introduced, formation microtrenches pores on surfaces electrochemical etching etching) also described. It emphasized that key technology in these procedures to use as target solution, anodic oxide films play an important role processes.

参考文章(21)
C B Scruby, L E Drain, Laser Ultrasonics Techniques and Applications ,(1990)
R. F. Karlicek, V. M. Donnelly, G. J. Collins, Laser-induced metal deposition on InP Journal of Applied Physics. ,vol. 53, pp. 1084- 1090 ,(1982) , 10.1063/1.330520
J Gobet, F Cardot, J Bergqvist, F Rudolf, Electrodeposition of 3D microstructures on silicon Journal of Micromechanics and Microengineering. ,vol. 3, pp. 123- 130 ,(1993) , 10.1088/0960-1317/3/3/007
Madhav Datta, Derek Harris, Electrochemical micromachining: An environmentally friendly, high speed processing technology Electrochimica Acta. ,vol. 42, pp. 3007- 3013 ,(1997) , 10.1016/S0013-4686(97)00147-3
Jan W. M. Jacobs, Jan M. G. Rikken, Oxygen‐Diffusion‐Size Effect in Electroless Metal Deposition Journal of The Electrochemical Society. ,vol. 135, pp. 2822- 2827 ,(1988) , 10.1149/1.2095440
A. Thies, G. Schanz, E. Walch, J. Konys, Chemical deposition of metals for the formation of microstructures: An alternative method to galvanoforming? Electrochimica Acta. ,vol. 42, pp. 3033- 3040 ,(1997) , 10.1016/S0013-4686(97)00150-3
B. Eliasson, U. Kogelschatz, UV excimer radiation from dielectric-barrier discharges Applied Physics B. ,vol. 46, pp. 299- 303 ,(1988) , 10.1007/BF00686452
Josep Arnó, Zheng Yuan, Shawn Murphy, Fourier Transform Infrared Characterization of Downstream Gas‐Phase Species Generated by Tetraethylorthosilicate/Ozone Atmospheric Pressure Reactions Journal of The Electrochemical Society. ,vol. 146, pp. 276- 280 ,(1999) , 10.1149/1.1391599
A. K. Al‐Sufi, H. J. Eichler, J. Salk, H. J. Riedel, Laser induced copper plating Journal of Applied Physics. ,vol. 54, pp. 3629- 3631 ,(1983) , 10.1063/1.332404