Micropositioners for microscopy applications based on the stick-slip effect

摘要: Piezo actuators are widely used for precision positioning purposes where a submicron resolution is needed. Among the possible means to increase working range of those whose stroke is, depending on material, usually limited small fraction actuator length, stepping motion actuator. We use based stick and slip effect in order achieve long while maintaining advantage virtually unlimited resolution. In this paper we introduce miniature x-y-stages dedicated manipulation samples under microscope. As previous setups experiments have shown, parallel kinematic structure microscopy or micro assembly not well suited because x y an influence each other. A system with serial has therefore been developed. The proposed device will provide same capabilities as existing motorized stages, but at lower cost than manual stages very compact size.