Chemical deposition of Al2O3 thin films on Si substrates
作者： P. Vitanov , A. Harizanova , T. Ivanova , T. Dimitrova
DOI: 10.1016/J.TSF.2009.02.085
关键词: Fourier transform infrared spectroscopy 、 Thin film 、 Chemistry 、 Spin coating 、 Fourier transform spectroscopy 、 Silicon 、 Electrical measurements 、 Analytical chemistry 、 Annealing (metallurgy) 、 Optoelectronics 、 Coating
摘要: … 2 O 3 thin films prepared by sol–gel technique as a function of annealing temperature. The films … their electrical properties were studies by incorporation of Al 2 O 3 films in MIS structure. …
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