Performance of Electro-Thermally Driven ${\rm VO}_{2}$ -Based MEMS Actuators
作者： Rafmag Cabrera , Emmanuelle Merced , Nelson Sepulveda
DOI: 10.1109/JMEMS.2013.2271774
关键词: Actuator 、 Microelectromechanical systems 、 Thin film 、 Materials science 、 Resistive touchscreen 、 Cantilever 、 Finite element method 、 Current (fluid) 、 Electronic engineering 、 Optoelectronics 、 Electrical conductor
摘要: The integration of VO2 thin films in a MEMS actuator device is presented. structural phase transition was induced electro-thermally by resistive heaters monolithically integrated the actuator. drastic mechanical displacements generated large stress during film have been characterized for static and time-dependent current pulses to heater, air vacuum environments. A comprehensive simplified finite element model developed validated with experimental data. It found that cut-off frequency 300 μm-long VO2-based operated (f3dB=29 Hz) mostly limited conductive heat loss through anchor, whereas convection losses were more dominant (f3dB=541 Hz). be strongly dependent on dimensions cantilever when but far less vacuum. Total deflections 68.7 28.5 μm observed 200 cantilevers, respectively. Full actuation required ~ 16 times power than
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