Structural properties of In-In2O3 composite films
作者： K Ulutaş , D Değer , N Kalkan , S Yildirim , Y G Çelebi
DOI: 10.1088/1757-899X/15/1/012095
关键词: Partial pressure 、 Transmission electron microscopy 、 Lattice (order) 、 Materials science 、 Composite material 、 Composite number 、 Thin film 、 Diffraction 、 Crystal structure 、 Tetragonal crystal system 、 Crystallography
摘要: Pure indium metal was thermally evaporated in the presence of oxygen atmosphere, with partial pressure 6.6×10−2 Pa, onto glass substrates and C-Cu grid at room temperature. The structural characteristics these optically transparent electrically conducting thin films were investigated using X-ray diffraction (XRD) transmission electron microscopy (TEM) techniques results are discussed on base differences their morphologies thicknesses. Cubic In2O3 tetragonal In phases, crystal structures lattice parameters as reported literature, have been identified thinnest film having 100 nm thickness. tendency for amorphization cubic phases becomes evident thickness increases.
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