Flow compensation in a MEMS dual-thermal conductivity detector for hydrogen sensing in natural gas
作者： G. de Graaf , A. Abarca Prouza , R.F. Wolffenbuttel
DOI: 10.1109/TRANSDUCERS.2015.7181145
关键词: Analytical chemistry 、 Detector 、 Materials science 、 Optoelectronics 、 Microelectromechanical systems 、 Hydrogen sensor 、 Hydrogen 、 Multiphysics 、 Thermal conductivity detector 、 Thermal conductivity 、 Thermal conduction
摘要: Conventional thermal conductivity detectors (TCDs) demonstrate a flow dependence. The approach presented here to reduce the dependence is based on on-line compensation using two thin-film sensors membranes in parallel same chip that are differentially operated. These laterally identically, but with different depth of detection chamber, resulting quasi-static sensitivities sample gas. effects conduction and convection structure have been studied COMSOL Multiphysics. First prototypes fabricated presently tested.
tudelft.nl参考文章(8)
H. A. Daynes, Gas analysis : by measurement of thermal conductivity University Press. ,(1933)
Shin-Ichi Ohira, Kei Toda, Micro gas analyzers for environmental and medical applications. Analytica Chimica Acta. ,vol. 619, pp. 143- 156 ,(2008) , 10.1016/J.ACA.2008.05.010
S J Kim, Gas sensors based on Paschen's law using carbon nanotubes as electron emitters Journal of Physics D. ,vol. 39, pp. 3026- 3029 ,(2006) , 10.1088/0022-3727/39/14/022
Ronald P. Manginell, James H. Smith, Antonio J. Ricco, An overview of micromachined platforms for thermal sensing and gas detection SPIE meeting on smart structures and materials, San Diego, CA (United States), 3-6 Mar 1997. ,vol. 3046, pp. 273- 284 ,(1997) , 10.1117/12.276616
B C Kaanta, H Chen, X Zhang, Novel device for calibration-free flow rate measurements in micro gas chromatographic systems Journal of Micromechanics and Microengineering. ,vol. 20, pp. 095034- ,(2010) , 10.1088/0960-1317/20/9/095034
G. de Graaf, R.F. Wolffenbuttel, Surface-micromachined thermal conductivity detectors for gas sensing instrumentation and measurement technology conference. pp. 1861- 1864 ,(2012) , 10.1109/I2MTC.2012.6229412
Pascal Tardy, Jean-René Coulon, Claude Lucat, Francis Menil, Dynamic thermal conductivity sensor for gas detection Sensors and Actuators B-chemical. ,vol. 98, pp. 63- 68 ,(2004) , 10.1016/J.SNB.2003.09.019
Solid state gas sensors Measurement Science and Technology. ,vol. 8, pp. 223- 237 ,(1997) , 10.1088/0957-0233/8/3/003