Lithographic motion control system and method

摘要: A lithographic apparatus comprising a control system, such as motion is presented. The system includes an actuator for effecting movement of moveable part and feed-forward path from setpoint input the to actuator. further feed-back loop, transfer function having which inverse stable inverse, including remainder potentially unstable inverse. delay function, second part. difference in between equal function. Further, method described find optimal controller directly on basis measured data.